DocumentCode
980670
Title
Current transport mechanisms in atomically abrupt metal-semiconductor interfaces
Author
Shenai, Krishna ; Dutton, Robert W.
Author_Institution
Integrated Circuits Lab., Stanford Univ., CA, USA
Volume
35
Issue
4
fYear
1988
fDate
4/1/1988 12:00:00 AM
Firstpage
468
Lastpage
482
Abstract
A comprehensive model for electron transport mechanisms across a fully formed Schottky-barrier junction is proposed in which the metal-semiconductor interface is approximated as an abrupt quantum mechanical transition. Improved formulations of the barrier-lowering mechanisms and carrier tunneling effects are derived where the dipole barrier lowering is modeled as a single exponential decay of the total surface charge density. Quantum calculations follow a two-band model in which the imaginary component of the electron wave vector in the semiconductor energy gap is obtained by including the effect of both conduction and valence states. The energy band profile effects are included in the calculation of tunneling current, and it is shown that the finite negative charge residing at the metal-semiconductor interface considerably modulates the tunneling transmission probability of carriers. Experimental results obtained from atomically clean Al-n+ GaAs-nGaAs interfaces fabricated by in situ molecular-beam epitaxy (MBE) are shown to be in excellent agreement with the transport calculations
Keywords
III-V semiconductors; Schottky effect; aluminium; gallium arsenide; molecular beam epitaxial growth; semiconductor device models; semiconductor-metal boundaries; Al-GaAs; Al-n+GaAs-nGaAs interfaces; MBE; Schottky-barrier junction; abrupt quantum mechanical transition; atomically abrupt metal-semiconductor interfaces; barrier-lowering mechanisms; calculation of tunneling current; carrier tunneling effects; current transport mechanism; dipole barrier lowering; electron transport mechanisms; electron wave vector; energy band profile effects; finite negative charge; molecular-beam epitaxy; semiconductor energy gap; semiconductors; single exponential decay; total surface charge density; tunneling transmission probability; two-band model; valence states; Atomic layer deposition; Electrons; Laboratories; Molecular beam epitaxial growth; Optical surface waves; Semiconductor materials; Semiconductor-metal interfaces; Temperature distribution; Tunneling; Vacuum systems;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.2481
Filename
2481
Link To Document