• DocumentCode
    980808
  • Title

    Optical Y-junctions and S-bends formed by preferentially etched single-mode rib waveguides in InP

  • Author

    Buchmann, Peter ; Houghton, A.J.N.

  • Author_Institution
    British Telecom Research Laboratories, Ipswich, UK
  • Volume
    18
  • Issue
    19
  • fYear
    1982
  • Firstpage
    850
  • Lastpage
    852
  • Abstract
    Single-mode optical Y-junctions are demonstrated in epitaxial n¿/n+ InP. The rib waveguides with rectangular cross-section have been made using wet chemical etching in an HCI:H3PO4 preferential etchant. The minimum measured loss due to the branching point is approximately 1 dB for Y-junctions with a branching angle of 0.9° at the tip.
  • Keywords
    III-V semiconductors; etching; indium compounds; integrated optics; optical waveguides; HCL:H3PO4; InP; S-bends; branching point; optical Y-junctions; preferentially etched single-mode rib waveguides; wet chemical etching;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19820578
  • Filename
    4246912
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=980808