Title :
Uniaxially strained ZnO/SiO2/Si SAW resonators
Author :
Martin, S.J. ; Gunshor, R.L. ; Pierret, R.F. ; Gorodetsky, G.
Author_Institution :
Purdue University, School of Electrical Engineering, West Lafayette, USA
Abstract :
Surface-acoustic-wave (SAW) resonators fabricated on a ZnO/SiO2/Si layered medium have been cantilever-mounted. By deflecting the free end of the substrate, uniaxial biasing strains are induced in the SAW resonator. The effect of these static strains on resonant frequency and SAW phase velocity is assessed.
Keywords :
crystal resonators; silicon compounds; surface acoustic wave devices; zinc compounds; ZnO/SiO2/Si SAW resonators; cantilever mounting; phase velocity; substrate; uniaxial biasing strains;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19820705
