DocumentCode :
983163
Title :
Erratum: Nondestructive film thickness measurement on industrial diamond
Author :
Weglein, R.D.
Volume :
19
Issue :
2
fYear :
1983
Firstpage :
74
Keywords :
gold; metallic thin films; sputtered coatings; surface acoustic waves; thickness measurement; 50 MHz; Au-film thickness; SAW dispersion curve; acoustic microscope; sputter deposited; surface-acoustic wave velocities; type IIA diamond;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19830054
Filename :
4247227
Link To Document :
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