Title :
3-D Micro Coaxial Transmission Lines With Integrated MEM Capacitors
Author :
Natarajan, Saravana P. ; Weller, Thomas M. ; Hoff, Andrew M.
Author_Institution :
South Florida Univ., Tampa
Abstract :
This paper introduces a 20 mum-tall, rectangular micro coaxial transmission line with an embedded micro electromechanical (MEM) capacitor. The measured capacitance ratio is about 6.5 with an actuation voltage of 30-50 V. To the best of the authors´ knowledge, this is the first time a MEM device has been implemented within a fully-shielded, micro coaxial transmission line structure. The fabrication includes a single step release process for a dual layer suspended structure (beam and the top lid).
Keywords :
coaxial cables; electrolytic capacitors; micromechanical devices; transmission lines; 3-D microcoaxial transmission lines; dual layer suspended structure; embedded micro electromechanical device; integrated MEM capacitor; Capacitance; Capacitors; Coaxial cables; Coaxial components; Conductors; Distributed parameter circuits; Fabrication; Impedance; Radio frequency; Transmission lines; Micro coax capacitor; micro electromechanical (MEM) capacitor; rectangular coax; variable capacitor;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2007.910487
