A novel ion imager for secondary ion mass spectrometry

Author

Matsumoto, Kaname ; Yurimoto, H. ; Kosaka, Keishi ; Miyata, Kenji ; Nakamura, T. ; Sueno, Shigeho

Author_Institution

Olympus Optical Co. Ltd., Nagano, Japan

Volume

40

Issue

1

fYear

1993

fDate

1/1/1993 12:00:00 AM

Firstpage

82

Lastpage

85

Abstract

An area detector for a secondary ion mass spectrometry (SIMS) ion microscope and its performance are described. The operational principle is based on detecting the change in potential of a floating photodiode caused by the ion-induced secondary-electron emission and the incoming ion itself. The experiments demonstrated that 10¹-10⁵ aluminum ions per pixel can be detected with good linear response. Moreover, relative ion sensitivities from hydrogen to lead were constant within a factor of 2. The performance of this area detector provides the potential for detection of kiloelectronvolt ion images with current ion microscopy

Keywords

ion microscopes; mass spectrometer components and accessories; secondary ion mass spectroscopy; SIMS; area detector; floating photodiode; ion imager; ion microscopy; ion sensitivities; kiloelectronvolt ion images; linear response; secondary ion mass spectrometry; Aluminum; Ambient intelligence; Detectors; Electrodes; Linearity; Mass spectroscopy; Optical microscopy; Photodiodes; Prototypes; Silicon;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.249428

Filename

249428