Title :
High-resolution mapping of pn-junctions by computer-processed EBIC-signals
Author :
Schink, H.K. ; Rehme, H.
Author_Institution :
Siemens AG, Forschungslaboratorien, Mÿnchen, West Germany
Abstract :
Computer processing is introduced to increase resolution in EBIC measurements.
Keywords :
electronic engineering computing; integrated circuit testing; p-n junctions; scanning electron microscope examination of materials; EBIC image processing; EBIC signals; IC testing; SEM; computer processed; doping distributions; high resolution mapping; integrated circuits; p-n junctions; two-dimensional potential distributions;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830266
