Cr migration in CoNiTa/Cr films by annealing

Author

Kawanabe, T. ; Hasegawa, K. ; Ono, S. ; Nakagawa, S. ; Naoe, M.

Author_Institution

Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan

Volume

26

Issue

1

fYear

1990

fDate

1/1/1990 12:00:00 AM

Firstpage

42

Lastpage

44

Abstract

CoNiTa/Cr double-layered films for longitudinal magnetic recording media have been prepared by using the facing targets sputtering apparatus. Substrate heating and postannealing were performed in order to increase the coercive force H_c. While the as-deposited film at the substrate temperature T_s of 400°C had H_c of 780 Oe, the films deposited at T_s of room temperature, exposed to atmosphere, and annealed at 400°C, had H_c as high as 1700 Oe. It has been found that the same amount of Cr atoms migrated from the underlayer to the magnetic layer and the vicinity of the film surface. Consequently, such a large increase of H_c seemed to be caused by isolation of magnetic grains by Cr atoms in their boundaries

Keywords

annealing; chemical interdiffusion; cobalt alloys; coercive force; ferromagnetic properties of substances; magnetic recording; magnetic surface phenomena; magnetic thin films; nickel alloys; sputtered coatings; tantalum alloys; CoNiTa-Cr; Cr migration; Cr underlayer; annealing; coercive force; double-layered films; facing targets sputtering; isolation of magnetic grains; longitudinal magnetic recording media; magnetic layer; magnetic thin films; postannealing; underlayer; Annealing; Atomic layer deposition; Chromium; Coercive force; Heating; Magnetic films; Magnetic recording; Sputtering; Substrates; Temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.50484

Filename

50484