Title :
Growth of garnet thin films for magneto-optic memories by pyrosol CVD process
Author :
Deschanvres, J.L. ; Langlet, M. ; Labeau, M. ; Joubert, J.C.
Author_Institution :
Ecole Nat. Superieure de Phys. de Grenoble, Domaine Univ., Saint Martin d´´Heres, France
fDate :
1/1/1990 12:00:00 AM
Abstract :
A description is given of the deposition of garnet thin films for magnetooptic memories. The deposition technique (pyrosol process) is based on the pyrolysis of an ultrasonic generated aerosol, which contains the dissolved organometallic precursors. Films have been deposited at temperatures ranging from 520° to 600 °C. Y3 Fe5O12 polycrystalline thin films with good crystallinity were obtained on glass or fused quartz substrates after annealing the deposited films. Single-crystal thin films were grown by epitaxy on GGG single-crystal wafers as shown by grazing X-ray diffraction and Kikuchi experiments. Magnetic and magnetooptic properties of the films were very close to the bulk material properties
Keywords :
Faraday effect; chemical vapour deposition; garnets; magnetic epitaxial layers; magnetic thin films; magnetisation; magneto-optical recording; pyrolysis; vapour phase epitaxial growth; yttrium compounds; 520 to 600 degC; Faraday rotation; GdGG; GdGa5O12; Kikuchi experiments; YFe5O12; YIG; crystallinity; deposition temperature; epitaxy; fused quartz substrates; garnet thin films; glass substructure; grazing X-ray diffraction; magnetic properties; magnetisation curve; magnetooptic memories; magnetooptic properties; organometallic precursors; polycrystalline thin films; pyrolysis; pyrosol CVD process; ultrasonic generated aerosol; Aerosols; Annealing; Crystallization; Garnet films; Glass; Iron; Magnetic films; Sputtering; Substrates; Temperature distribution;
Journal_Title :
Magnetics, IEEE Transactions on
