Title :
Influence of substrate conductivity on characteristics of ZnO/SiO2-diaphragm piezoelectric resonators
Author :
Nakamura, Kentaro ; Sasaki, Hiromu ; Shimizu, Hiroshi
Author_Institution :
Tohoku University, Faculty of Engineering, Sendai, Japan
Abstract :
Most of the ZnO/SiO2-diaphragm piezoelectric composite resonators on silicon substrates exhibit Q-factors of the anti-resonance much lower than those of the resonance. It is demonstrated both theoretically and experimentally that this is caused by the conductivity of the substrate.
Keywords :
Q-factor; crystal resonators; silicon compounds; zinc compounds; Q-factors; Si substrate; ZnO/SiO2-diaphragm piezoelectric resonators; substrate conductivity effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830354
