• DocumentCode
    986466
  • Title

    Influence of substrate conductivity on characteristics of ZnO/SiO2-diaphragm piezoelectric resonators

  • Author

    Nakamura, Kentaro ; Sasaki, Hiromu ; Shimizu, Hiroshi

  • Author_Institution
    Tohoku University, Faculty of Engineering, Sendai, Japan
  • Volume
    19
  • Issue
    14
  • fYear
    1983
  • Firstpage
    521
  • Lastpage
    522
  • Abstract
    Most of the ZnO/SiO2-diaphragm piezoelectric composite resonators on silicon substrates exhibit Q-factors of the anti-resonance much lower than those of the resonance. It is demonstrated both theoretically and experimentally that this is caused by the conductivity of the substrate.
  • Keywords
    Q-factor; crystal resonators; silicon compounds; zinc compounds; Q-factors; Si substrate; ZnO/SiO2-diaphragm piezoelectric resonators; substrate conductivity effect;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19830354
  • Filename
    4247846
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=986466