Title :
Fabrication of SiO2-TiO2 glass planar optical waveguides by flame hydrolysis deposition
Author :
Kawachi, M. ; Yasu, M. ; Edahiro, T.
Author_Institution :
NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
Abstract :
Low-loss SiO2TiO2 planar waveguides of 0.1 dB/cm have been fabricated by flame hydrolysis deposition suitable for mass-production. A CO2 laser was used to make a stripe waveguide structure for loss measurements.
Keywords :
flame sprayed coatings; integrated optics; optical glass; optical waveguides; optical workshop techniques; silicon compounds; titanium compounds; CO2 laser; SiO2-TiO2 planar waveguides; flame hydrolysis deposition; loss measurements; optical waveguides; stripe waveguide structure;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830398
