Barium ferrite thin films with perpendicular magnetic anisotropy have been prepared by DC diode sputtering. When a sintered target with appropriate composition was used, c-axis oriented Ba ferrite film was obtained whose easy direction of magnetization was normal to the film plane. Its saturation magnetization Ms, coercive force

and magnetic anisotropy constant Ku were 400 emu/cc, 680 Oe and 1.67 × 10
6erg/cc, respectively. Ba ferrite films may be usable as are Co-Cr films as a perpendicular magnetic recording medium.