Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS

Author

Zhuang, Yan Xin ; Hansen, Ole ; Knieling, Thomas ; Wang, Christian ; Rombach, Pirmin ; Lang, Walter ; Benecke, Wolfgang ; Kehlenbeck, Markus ; Koblitz, Jörn

Author_Institution

Tech. Univ. of Denmark, Lyngby

Volume

16

Issue

6

fYear

2007

Firstpage

1451

Lastpage

1460

Abstract

We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF₃(CF₂)₅(CH₂)₂SiCl₃ (FOTS), CF₃(CF₂)₅(CH₂)₂Si(OC₂H₅)₃ (FOTES), CF₃(CF₂)₅(CH₂)₂Si(CH₃)Cl₂ (FOMDS), CF₃(CF₂)₅(CH₂)₂Si(CH₃)₂Cl (FOMMS), CF₃(CF₂)₇(CH₂)₂SiCl₃ (FDTS), and CH₃(CH₂)₁₇(CH₂)₂SiCl₃ (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

Keywords

micromechanical devices; monolayers; self-assembly; stiction; substrates; thermal stability; MEMS; anti-stiction applications; microelectromechanical systems; nanoscale adhesive force; nanoscale friction force; organosilane precursors; roughness; silicon substrates; static contact angle; surface energy; thermal stability; vapor-phase self-assembled monolayers; Coatings; Friction; Micromechanical devices; Microstructure; Nanoelectromechanical systems; Nanostructures; Self-assembly; Silicon; Thermal force; Thermal stability; Adhesion; anti-stiction; friction; self-assembled monolayer (SAM); thermal stability; vapor phase;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2007.904342

Filename

4389171