DocumentCode
988991
Title
Integrated optical spectrum analyser using planar technology on oxidised silicon substrate
Author
Valette, S. ; Lizet, J. ; Mottier, P. ; Jadot, J.P. ; Renard, S. ; Fournier, A. ; Grouillet, A.M. ; Gidon, P. ; Denis, H.
Author_Institution
LETI/Commissariat Ã\xa0 l´Energie Atomique, Grenoble, France
Volume
19
Issue
21
fYear
1983
Firstpage
883
Lastpage
885
Abstract
We report, for the first time, the achievement of an integrated optical spectrum analyser on oxidised silicon substrate. This device uses an entire planar technology fully compatible with microelectronic processes.
Keywords
elemental semiconductors; integrated optics; silicon; spectral analysers; Fresnel lens; integrated optical spectrum analyser; oxidised Si substrate; planar technology;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19830602
Filename
4248130
Link To Document