• DocumentCode
    988991
  • Title

    Integrated optical spectrum analyser using planar technology on oxidised silicon substrate

  • Author

    Valette, S. ; Lizet, J. ; Mottier, P. ; Jadot, J.P. ; Renard, S. ; Fournier, A. ; Grouillet, A.M. ; Gidon, P. ; Denis, H.

  • Author_Institution
    LETI/Commissariat Ã\xa0 l´Energie Atomique, Grenoble, France
  • Volume
    19
  • Issue
    21
  • fYear
    1983
  • Firstpage
    883
  • Lastpage
    885
  • Abstract
    We report, for the first time, the achievement of an integrated optical spectrum analyser on oxidised silicon substrate. This device uses an entire planar technology fully compatible with microelectronic processes.
  • Keywords
    elemental semiconductors; integrated optics; silicon; spectral analysers; Fresnel lens; integrated optical spectrum analyser; oxidised Si substrate; planar technology;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19830602
  • Filename
    4248130