• DocumentCode
    989040
  • Title

    Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform

  • Author

    Yamada, Y. ; Takagi, A. ; Ogawa, Isamu ; Kawachi, M. ; Kobayashi, Masato

  • Author_Institution
    NTT Opto-electro. Labs., Ibaraki, Japan
  • Volume
    29
  • Issue
    5
  • fYear
    1993
  • fDate
    3/4/1993 12:00:00 AM
  • Firstpage
    444
  • Lastpage
    446
  • Abstract
    A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.
  • Keywords
    integrated optics; optical losses; optical waveguides; silicon compounds; SEM; SiO 2-Si; hybrid integration platform; low-loss waveguide; optical bench; optical hybrid integration; optical waveguide; propagation loss; terraced Si substrate;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930297
  • Filename
    250283
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=989040