Title :
Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform
Author :
Yamada, Y. ; Takagi, A. ; Ogawa, Isamu ; Kawachi, M. ; Kobayashi, Masato
Author_Institution :
NTT Opto-electro. Labs., Ibaraki, Japan
fDate :
3/4/1993 12:00:00 AM
Abstract :
A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.
Keywords :
integrated optics; optical losses; optical waveguides; silicon compounds; SEM; SiO 2-Si; hybrid integration platform; low-loss waveguide; optical bench; optical hybrid integration; optical waveguide; propagation loss; terraced Si substrate;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930297
