Title :
Micro-temperature sensor array with thin-film thermocouples
Author :
Park, J.-J. ; Taya, M.
Author_Institution :
Dept. of Mech. Eng., Univ. of Washington, WA, USA
fDate :
5/13/2004 12:00:00 AM
Abstract :
A micro-temperature sensor array with thin-film thermocouples (TFTCs) is developed. The TFTCs are made with T-type (copper-constantan) thermocouples to measure chip temperature distribution of electronic packaging. The sensor array of 150 nm thickness has 10×10 junctions within a 9×9 mm area.
Keywords :
arrays; electric sensing devices; electronics packaging; microsensors; temperature sensors; thermocouples; chip temperature distribution; copper constantan; electronic packaging; heat conduction; microtemperature sensor array; thermoelectric power; thin film thermocouples;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20040387
