A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

A microfluidic Coriolis mass flow sensor is discussed. The micromachined flow sensors are made using silicon tubes bonded onto a metallized glass substrate. True mass flow rates with an accuracy of better than plusmn0.5% were measured between 1 and 500 g/h. The sensor also provides a temperature and density output. The sensor output was resistant to pressure, temperature, vibration, fluid density, and viscosity. Unlike conventional steel Coriolis mass flowmeters, microelectromechanical-systems-based sensors are immune to external vibration. Applications for these low-flow-rate devices include chemical mixing, additives, biotechnology, chromatography, pharmaceutical development, and other areas where extremely small volumes of liquids are mixed, studied, or metered and where shock and vibration are encountered.