A magnetically driven linear microactuator with new driving method

Author

Komori, Mochimitsu ; Hirakawa, Takehiro

Author_Institution

Dept. of Appl. Sci. for Integrated Syst. Eng., Kyushu Inst. of Technol., Fukuoka, Japan

Volume

10

Issue

3

fYear

2005

fDate

6/1/2005 12:00:00 AM

Firstpage

335

Lastpage

338

Abstract

Electromagnetically driven microactuators are of interest because they have the potential to generate large deflections. Thus, we have been studying magnetically driven microactuators. This time, a magnetically driven linear microactuator has been newly developed by using microfabrication techniques. The microactuator is composed of a mobile microplatform (mover) with some permanent magnets (PMs) and a stator with a large number of planar coils. In this paper, two types of microplatforms are fabricated and compared with each other. Furthermore, static and dynamic characteristics of the magnetically driven linear microactuator are discussed.

Keywords

electromagnetic actuators; electrostatic actuators; nanotechnology; permanent magnet motors; magnetically driven linear microactuator; microfabrication technique; mobile microplatform; permanent magnets; planar coils; Coils; Electromagnetic forces; Electrostatic actuators; Fabrication; Lithography; Magnetic flux; Microactuators; Microcomputers; Signal generators; Stators; Linear drive; linear PM motor; magnetic attractive force; magnetic drive; microactuator;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/TMECH.2005.848294

Filename

1461410