Title :
A prealigned process of integrating optical waveguides with microfluidic devices
Author :
Lien, Victor ; Berdichevsky, Yevgeny ; Lo, Yu-Hwa
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of California, La Jolla, CA, USA
fDate :
6/1/2004 12:00:00 AM
Abstract :
We present a novel technology to monolithically integrate buried heterostructure waveguides with microfluidic channels in a prealigned manner. The fabrication process produced sealed microfluidic channels, low-loss waveguides, and excellent waveguide-channel alignment. The resultant device allows efficient optical coupling between the channels and the waveguides. Thus, the waveguides can both deliver the optical power and collect the emitted light.
Keywords :
integrated optics; microfluidics; optical couplers; optical fabrication; optical losses; optical waveguides; buried heterostructure waveguides; efficient optical coupling; fabrication process; integrating optical waveguides; low-loss waveguides; microfluidic devices; monolithic integration; optical power; prealigned process; sealed microfluidic channels; waveguide-channel alignment; Biomedical optical imaging; Fluorescence; Integrated optics; Microfluidics; Optical device fabrication; Optical devices; Optical fibers; Optical sensors; Optical waveguides; Stimulated emission;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.826774
