Title :
Frequency trimming for high-frequency SAW device using ultraviolet light
Author :
Setsune, K. ; Yamazaki, O. ; Wasa, K.
Author_Institution :
Matsushita Electric Industrial Co. Ltd., Central Research Laboratory, Moriguchi, Japan
Abstract :
A new technique for frequency trimming of surface-acoustic-wave (SAW) devices is demonstrated using ultraviolet light. Irradiation by ultraviolet light of a very thin SiO2 film which is fabricated on a quartz substrate makes it possible to adjust the operation frequency within an accuracy of better than ±10 kHz at 900 MHz with an insertion loss increase of less than 1 dB. This technique is applied successfully to a 668 MHz SAW resonator.
Keywords :
crystal resonators; frequency control; quartz; silicon compounds; substrates; surface acoustic wave devices; tuning; SAW resonator; UHF; UV frequency trimming; accuracy <10 kHz at 900 MHz; frequency trimming; high-frequency SAW device; insertion loss increase; quartz substrate; thin SiO2 film; ultraviolet light;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840300
