• DocumentCode
    993050
  • Title

    Photodisplacement microscopy

  • Author

    Burov, J.I. ; Bransalov, K.P.

  • Author_Institution
    Sofia University, Faculty of Physics, Department of Solid State Physics, Sofia, Bulgaria
  • Volume
    20
  • Issue
    13
  • fYear
    1984
  • Firstpage
    568
  • Lastpage
    570
  • Abstract
    The photodisplacement microscopy for depth probing and control of a silicon plate cross-section homogenity is developed, as the one-arm optical bridge with interference Newton fringes is used. For determining the thickness of a silicon plate and for visualising its cross-section the frequency dependence of the thermal waves penetration depth is measured.
  • Keywords
    acoustic microscopes; acousto-optical effects; measurement by laser beam; nondestructive testing; thickness measurement; IC testing; NDT; Si plate; acoustic microscopes; acousto-optics; cross-section homogeneity control; depth probing; frequency dependence; interference Newton fringes; measurement by laser beam; nondestructive testing; one-arm optical bridge; photodisplacement microscopy; thermal waves penetration depth; thickness determination;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19840394
  • Filename
    4248865
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=993050