Title :
Plasma-charging damage of floating MIM capacitors
Author :
Wang, Zhichun ; Ackaert, Jan ; Salm, Cora ; Kuper, Fred G. ; Tack, Marnix ; De Backer, Eddy ; Coppens, Peter ; De Schepper, Luc ; Vlachakis, Basil
Author_Institution :
Twente Univ., Enschede, Netherlands
fDate :
6/1/2004 12:00:00 AM
Abstract :
In this paper, the mechanism of plasma-charging damage (PCD) of metal-insulator-metal (MIM) capacitors as well as possible protection schemes are discussed. A range of test structures with different antennas simulating interconnect layout variations have been used to investigate the mechanism of PCD of MIM capacitors. Based on the experimental results, two models are presented, describing the relation between the damage and the ratio of the area of the exposed antennas connected to the MIM capacitors plates. New design rules are proposed in order to predict and automatically flag possible PCD sites. Furthermore, layout solutions to reduce PCD are suggested.
Keywords :
MIM devices; antennas in plasma; capacitors; interconnections; surface charging; MIM capacitor plates; PCD reduction; antenna ratio; exposed antennas; floating MIM capacitors; interconnect layout variations; metal-insulator-metal capacitors; plasma-charging damage; protection schemes; BiCMOS integrated circuits; Dielectrics; Integrated circuit reliability; MIM capacitors; Parasitic capacitance; Plasma density; Protection; Q factor; Radio frequency; Voltage; AR; Antenna ratio; MIM; PCD; metal–insulator–metal; plasma-charging damage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2004.829518
