Title :
Monitoring the tilt angle of an ion-beam cross-section
Author :
Szajnowski, W.J.
Author_Institution :
University of Warsaw, Institute of Telecommunications Technical, Warsaw, Poland
Abstract :
A nondestructive method is presented to monitor the tilt angle of an elliptical cross-section of an ion beam. The desired information is extracted from random signals induced by the beam on four metal electrodes forming part of a flight tube.
Keywords :
angular measurement; ion beams; ion implantation; cross section tilt angle measurement; elliptical cross-section; flight tube; four metal electrodes; ion implantation; ion-beam cross-section; monitoring; nondestructive method;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840414
