Title :
Novel Single Polysilicon EEPROM Cell With Dual Work Function Floating Gate
Author :
Na, Kee-Yeol ; Kim, Yeong-Seuk
Author_Institution :
Dept. of Semicond. Eng., Chung-Buk Nat. Univ., Cheongju
Abstract :
A novel single polysilicon electrically erasable programmable read-only memory cell with dual work function floating-gate (DWFG) structure is presented in this letter. The floating gate of the proposed DWFG cell is doped with p+ on the source side and n+ on the drain side. For DWFG devices, the floating gate on the source side has a higher work function than that on the drain side. The work function difference and the intrinsic doped region at the middle of the floating-gate affect the channel potential distribution and generate a peak lateral electric field inside the channel, improving the channel´s hot electron programming characteristics. The experimental results show that the proposed DWFG cell gives faster programming speeds and program operation at lower voltage than conventional cells
Keywords :
EPROM; hot carriers; work function; EEPROM Cell; channel hot electron programming; dual work function floating gate; electrically erasable programmable read-only memory; standard logic process; Channel hot electron injection; Current measurement; EPROM; Functional programming; Logic programming; Nonvolatile memory; PROM; Programming profession; Silicides; Voltage; Channel hot electron (CHE) programming; dual work function floating gate (DWFG); high programming speed; single polysilicon electrically erasable programmable read-only memory (EEPROM); standard logic process;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2006.889227