DocumentCode :
994610
Title :
Properties of NbN films crystallized from the amorphous state
Author :
Gavaler, J.R. ; Greggi, J. ; Wilmer, R. ; Ekin, J.W.
Author_Institution :
Westinghouse R&D Center, Pittsburgh, PA
Volume :
19
Issue :
3
fYear :
1983
fDate :
5/1/1983 12:00:00 AM
Firstpage :
418
Lastpage :
421
Abstract :
Cubic Bl structure NbN was prepared by annealing amorphous Nb-N films made by sputtering niobium in an argon-nitrogen atmosphere onto low temperature ( 
C) substrates. Crystallized films on sapphire substrates have equiaxed grains while films on niobium are columnar. Grain sizes vary from 12.5 nm to > 100 nm. The highest superconducting critical properties measured in these films are: Tc = 16K, Jc (4.2K, zero field) = 8 × 105A/cm2, and Bc2 (1.3K) = 28T. Data on the effect of uniaxial tensile strain on Jc show that there is no measurable elastic (reversible) strain effect. Irreversible Jc degradation begins at an intrinsic tensile strain of 1.3% in the best case.
C) substrates. Crystallized films on sapphire substrates have equiaxed grains while films on niobium are columnar. Grain sizes vary from 12.5 nm to > 100 nm. The highest superconducting critical properties measured in these films are: TKeywords :
Amorphous semiconductor materials/devices; Conducting films; Sputtering; Superconducting materials; Amorphous materials; Annealing; Atmosphere; Crystallization; Grain size; Niobium; Sputtering; Strain measurement; Superconducting films; Tensile strain;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1983.1062421
Filename :
1062421
Link To Document :
