Title :
JAWS-SNAP refractory logic circuits
Author :
Jillie, D.W. ; Smith, L.N. ; Kroger, H.
Author_Institution :
Sperry Research Center, Sudbury, MA
fDate :
5/1/1983 12:00:00 AM
Abstract :
We describe a Josephson integrated circuit technology based on Nb-aSi-Nb tunnel junctions patterned by the selective niobium anodization process (SNAP). This technology also uses Mo resistors, bias-sputtered SiO2insulators, and Nb wiring to complete circuits of the direct current-injection variety using only five photolithographic steps. We have fabricated and tested chains of JAWS "OR" gates produced with this process. Proper operation is obtained for supply and offset currents varying by ± 20% (FANOUT = 1) and ± 10% (FANOUT = 2). This is in good agreement with calculations.
Keywords :
Josephson device logic circuits; Etching; Fabrication; Integrated circuit technology; Josephson junctions; Lead; Logic circuits; Niobium; Strips; Superconducting materials; Wiring;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1983.1062484
