• DocumentCode
    995315
  • Title

    JAWS-SNAP refractory logic circuits

  • Author

    Jillie, D.W. ; Smith, L.N. ; Kroger, H.

  • Author_Institution
    Sperry Research Center, Sudbury, MA
  • Volume
    19
  • Issue
    3
  • fYear
    1983
  • fDate
    5/1/1983 12:00:00 AM
  • Firstpage
    1170
  • Lastpage
    1173
  • Abstract
    We describe a Josephson integrated circuit technology based on Nb-aSi-Nb tunnel junctions patterned by the selective niobium anodization process (SNAP). This technology also uses Mo resistors, bias-sputtered SiO2insulators, and Nb wiring to complete circuits of the direct current-injection variety using only five photolithographic steps. We have fabricated and tested chains of JAWS "OR" gates produced with this process. Proper operation is obtained for supply and offset currents varying by ± 20% (FANOUT = 1) and ± 10% (FANOUT = 2). This is in good agreement with calculations.
  • Keywords
    Josephson device logic circuits; Etching; Fabrication; Integrated circuit technology; Josephson junctions; Lead; Logic circuits; Niobium; Strips; Superconducting materials; Wiring;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1983.1062484
  • Filename
    1062484