DocumentCode
995315
Title
JAWS-SNAP refractory logic circuits
Author
Jillie, D.W. ; Smith, L.N. ; Kroger, H.
Author_Institution
Sperry Research Center, Sudbury, MA
Volume
19
Issue
3
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
1170
Lastpage
1173
Abstract
We describe a Josephson integrated circuit technology based on Nb-aSi-Nb tunnel junctions patterned by the selective niobium anodization process (SNAP). This technology also uses Mo resistors, bias-sputtered SiO2 insulators, and Nb wiring to complete circuits of the direct current-injection variety using only five photolithographic steps. We have fabricated and tested chains of JAWS "OR" gates produced with this process. Proper operation is obtained for supply and offset currents varying by ± 20% (FANOUT = 1) and ± 10% (FANOUT = 2). This is in good agreement with calculations.
Keywords
Josephson device logic circuits; Etching; Fabrication; Integrated circuit technology; Josephson junctions; Lead; Logic circuits; Niobium; Strips; Superconducting materials; Wiring;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1983.1062484
Filename
1062484
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