• DocumentCode
    995337
  • Title

    Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices

  • Author

    Yashiro, K. ; Nagumo, M. ; Ohkawa, S. ; Kinoshita, Y.

  • Author_Institution
    Chiba University, Department of Electronic Engineering, Chiba, Japan
  • Volume
    20
  • Issue
    22
  • fYear
    1984
  • Firstpage
    908
  • Lastpage
    909
  • Abstract
    Enhancement of electromechanical coupling has been shown in numerical calculations with an additional massive and conducting layer, such as Au, which makes the velocity of SAW slow between a ZnO thin film and an Si substrate. It is also shown that the electromechanical coupling factor can be increased without deterioration of the temperature coefficient of phase velocity.
  • Keywords
    electromechanical effects; silicon; surface acoustic wave devices; zinc compounds; Au; SAW velocity; Si substrate; ZnO thin film; ZnO-Si monolithic SAW devices; electromechanical coupling; heavy metal layer; numerical calculations; temperature coefficient of phase velocity;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19840617
  • Filename
    4249129
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=995337