Title :
Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices
Author :
Yashiro, K. ; Nagumo, M. ; Ohkawa, S. ; Kinoshita, Y.
Author_Institution :
Chiba University, Department of Electronic Engineering, Chiba, Japan
Abstract :
Enhancement of electromechanical coupling has been shown in numerical calculations with an additional massive and conducting layer, such as Au, which makes the velocity of SAW slow between a ZnO thin film and an Si substrate. It is also shown that the electromechanical coupling factor can be increased without deterioration of the temperature coefficient of phase velocity.
Keywords :
electromechanical effects; silicon; surface acoustic wave devices; zinc compounds; Au; SAW velocity; Si substrate; ZnO thin film; ZnO-Si monolithic SAW devices; electromechanical coupling; heavy metal layer; numerical calculations; temperature coefficient of phase velocity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840617
