Title :
Modeling of electron cyclotron resonance discharges
Author :
Meyyappan, M. ; Govindan, T.R.
Author_Institution :
Scientific Research Inc., Glastonbury, CT, USA
fDate :
8/1/1995 12:00:00 AM
Abstract :
A simple model to predict the spatially-averaged plasma characteristics of electron cyclotron resonance (ECR) reactors is presented. The model consists of global conservation equations for species concentration, electron density and energy. A gas energy balance is used to predict the neutral temperature self-consistently. The model is demonstrated for an ECR argon discharge. The predicted behavior of the discharge as a function of system variables agrees well with experimental observations
Keywords :
argon; discharges (electric); high-frequency discharges; plasma density; plasma diagnostics; plasma temperature; Ar; Ar discharge; electron cyclotron resonance discharges; electron density; gas energy balance; global conservation equations; modeling; neutral temperature; self-consistent method; spatially-averaged plasma characteristics; species concentration; Argon; Cyclotrons; Electrons; Equations; Inductors; Plasma density; Plasma properties; Plasma temperature; Predictive models; Resonance;
Journal_Title :
Plasma Science, IEEE Transactions on
