DocumentCode :
996000
Title :
Response of a MEMS Microshutter Operating at 60 K to Ionizing Radiation
Author :
Buchner, S. ; Rapchun, David A. ; Moseley, Harvey ; Meyer, Stephen E. ; Oldham, Tim ; Ray, Knute ; Tuttle, Jim ; Quinn, Ed ; Buchanan, Ernie ; Bloom, Dave ; Hait, Tom ; Pearce, Mike ; Beamer, A.
Author_Institution :
Perot Syst., Seabrook
Volume :
54
Issue :
6
fYear :
2007
Firstpage :
2463
Lastpage :
2467
Abstract :
Total ionizing dose (TID) measurements at low temperature (60 K) of a micro-electro-mechanical system (MEMS) microshutter array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.
Keywords :
micromechanical devices; radiation effects; MEMS; applied bias; insulators; ionizing radiation effects; micro-electro-mechanical system; microshutter; temperature 60 K; Degradation; Infrared detectors; Infrared spectra; Ionizing radiation; Microelectromechanical systems; Micromechanical devices; NASA; Space technology; Telescopes; Temperature measurement; Insulators; low temperature; micro-electro-mechanical system; total ionizing dose;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2007.910040
Filename :
4395005
Link To Document :
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