The Application of RHBD to n-MOSFETs Intended for Use in Cryogenic-Temperature Radiation Environments

Proton and X-ray irradiation effects are investigated in 0.35 m conventional, annular, and ringed-source radiation-hardening-by-design (RHBD) CMOS devices. Transistors were irradiated with protons at both 300 K and 77 K. Radiation-induced oxide trapped charges in the shallow trench isolation (STI) oxide deplete the p-substrate and effectively shunt the source and drain, inducing off-state leakage. Without the STI, RHBD nFETs exhibit no radiation-induced off-state shunt leakage currents for devices irradiated at both 300 K and 77 K. Conventional 0.35 mum pFETs were not degraded by proton irradiation, since the leakage path cannot be formed in the n-well. A simple CMOS logic inverter shows no degradation in output voltage after proton irradiation for all tested temperature and bias conditions. More advanced 130 nm node nFETs show less TID sensitivity to STI leakage due possibly to the smaller physical STI volume and/or additional doping located on the STI sidewall.