DocumentCode
998093
Title
Magnetic and structural characteristics of ion beam sputter deposited Co-Cr thin films
Author
Gill, H.S. ; Rosenblum, M.P. ; Gill, Harjot ; Rosenblum, Mendel
Author_Institution
Hewlett-Packard Laboratories, Palo Alto, California
Volume
19
Issue
5
fYear
1983
fDate
9/1/1983 12:00:00 AM
Firstpage
1644
Lastpage
1646
Abstract
-The magnetic and structural characteristics of ion beam sputter deposited Co82 Cr18 films were investigated. Films of between 1000A and 10,000A thickness were deposited on glass, titanium, chromium and amorphous Ta-W-Ni. The average angle of incidence of the sputtered species was normal to the substrate surface. Film orientation was determined by x-ray pole figure analysis. In films deposited on glass with thicknesses below 10,000A, the
Keywords
Magnetic recording/recording materials; Sputtering; Amorphous magnetic materials; Chromium; Etching; Ion beams; Magnetic films; Optical films; Perpendicular magnetic recording; Sputtering; Substrates; Titanium;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1983.1062737
Filename
1062737
Link To Document