Title :
Unidirectional surface-acoustic-wave transducers with a ZnO film on glass substrate
Author :
Shimizu, Y. ; Hata, T.
Author_Institution :
Tokyo Institute of Technology, Tokyo, Japan
Abstract :
A unidirectional surface-acoustic-wave transducer with a sputtered ZnO film on a glass substrate is presented, consisting of interdigital electrodes and a plate electrode on both sides of the film. Experiments are in good agreement with the equivalent-network approach, which is similar to Smith´s networks for the normal interdigital transducer.
Keywords :
acoustic surface wave devices; ultrasonic transducers; zinc compounds; SAW; ZnO film; glass substrate; interdigital electrodes; plate electrode; unidirectional surface acoustic wave transducer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19770278