Title :
Research on carbon nanotube array field emission pressure sensors
Author :
Qian, K. ; Chen, T. ; Yan, B. ; Lin, Y. ; Xu, D. ; Sun, Z. ; Cai, B.
Author_Institution :
Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., China
fDate :
7/7/2005 12:00:00 AM
Abstract :
A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.
Keywords :
carbon nanotubes; etching; field emission; field emitter arrays; microsensors; pressure sensors; C; accelerometers; anode elastic membrane; carbon nanotube arrays; field emission pressure sensors; microsensors; microvacuum cavity; sensitivity; tactile sensors; wet etching process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20051360
