DocumentCode
998450
Title
Research on carbon nanotube array field emission pressure sensors
Author
Qian, K. ; Chen, T. ; Yan, B. ; Lin, Y. ; Xu, D. ; Sun, Z. ; Cai, B.
Author_Institution
Key Lab. for Thin Film & Microfabrication Technol. of Minist. of Educ., Shanghai Jiao Tong Univ., China
Volume
41
Issue
14
fYear
2005
fDate
7/7/2005 12:00:00 AM
Firstpage
824
Lastpage
825
Abstract
A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.
Keywords
carbon nanotubes; etching; field emission; field emitter arrays; microsensors; pressure sensors; C; accelerometers; anode elastic membrane; carbon nanotube arrays; field emission pressure sensors; microsensors; microvacuum cavity; sensitivity; tactile sensors; wet etching process;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20051360
Filename
1468060
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