• Record number
    1043
  • Author

    John E.J. Schmitz

  • Creator Role
    نويسنده
  • Title

    Chemical vapor deposition of tungsten and tungsten ...

  • Publication
    New Jersey Noyes Publications
  • Published Year
    1992
  • Fierst Pages
    0
  • Main Pages
    236
  • Collation
    236
  • Notes
    621.395^cS34 , Glossary
  • Reprint
    False
  • Contents
    0
  • Print issue
    0
  • Subject

    Integrated circuits- Very large scale integration-+Tungsten

  • Class
    621.395
  • CutterNumber
    S34
  • Language
    انگليسي