Record number :
11553
Title :
Atomic layer deposition for semiconductors
Publication :
New York Springer
Published Year :
2014
Fierst Pages :
x
Main Pages :
263
Collation :
x، 263، illus، tables، som col
Reprint :
False
Added entries :
AU ویراستار Hwang Cheol Seong
Editor :
Hwang Cheol Seong
Subject :
Semiconductors- Surfaces , Atomic layer deposition , Semiconductors- Surfaces
Class :
621
Number :
38152
CutterNumber :
A 79
ISBN :
978-1-4614-8053-2
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=7&DC=11553
