Record number
1464
Author
Kiyotaka, Wasa
Creator Role
نويسنده
Title
Handbook of sputter deposition technology: principles, Technology and Applications
Publication
New Jersey Noyes Publications
Published Year
1992
Fierst Pages
0
Main Pages
304
Collation
304
Notes
621.38152^cW3 , Glossary
Reprint
False
Contents
0
Print issue
0
Added entries
AU نويسنده Hayakawa, Shigeru
Subject
Cathode sputtering )plating process(+Thin films
Class
621.38152
CutterNumber
W3
Language
انگليسي
Link To Document