• Record number
    3736
  • Author

    Klaus Graff

  • Creator Role
    نويسنده
  • Title

    Metal Impurities in Silicon Device Fabrication

  • Publication
    Berlin Springer
  • Published Year
    2000
  • Fierst Pages
    0
  • Main Pages
    268
  • Collation
    268
  • Notes
    621.3^cG7,2nd.ed.^n.8152 , Glossary
  • Reprint
    False
  • Contents
    0
  • Print issue
    0
  • Subject

    Semiconductors- Defects Silicon-Indusions Silicon-Defects Contamination )Technology(

  • Language
    انگليسي