Record number

5637

Title

Advances in CMP/Polishing technologies for the manufacture of electronic devices

Publication

Amsterdam Elsevier

Published Year

2012

Fierst Pages

xi

Main Pages

317

Collation

xi، 317، illus

Reprint

False

Added entries

AU ویراستار Doi Toshiro , AU ویراستار Marinescu Ioan D. , AU ویراستار Kurokawa Syuhei

Editor

Doi Toshiro

Subject

Electronic apparatus and appliances , Grinding and polishing

Class

667

Number

72

CutterNumber

A 3

ISBN

978-1-4377-7859-5

Language

انگليسي