مرکز منطقه ای اطلاع رساني علوم و فناوري - Advances in CMP/Polishing technologies for the manufacture of electronic devices

Record number :

5637

Title :

Advances in CMP/Polishing technologies for the manufacture of electronic devices

Publication :

Amsterdam Elsevier

Published Year :

2012

Fierst Pages :

Main Pages :

317

Collation :

xi، 317، illus

Reprint :

False

Added entries :

AU ویراستار Doi Toshiro , AU ویراستار Marinescu Ioan D. , AU ویراستار Kurokawa Syuhei

Editor :

Doi Toshiro

Subject :

Electronic apparatus and appliances , Grinding and polishing

Class :

667

Number :

CutterNumber :

A 3

ISBN :

978-1-4377-7859-5

Language :

انگليسي

Link To Document :