Title :
Fundamentals of microfabrication and nanotechnology
Publication :
Boca Raton CRC Press
Collation :
xiii، 641، color، illus، tables
Contents :
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology- V. 2. Manufacturing techniques for microfabrication and nanotechnology- V. 3. From MEMS to bio-MEMS and bio-NEMS: manufacturing techniques and applications
Subject :
Microelectronics , Integrated circuits- Design and construction , Microelectromechanical systems- Design and construction , Machining , Lasers- Industrial applications , Microelectronic packaging , Microfabrication , Nanostructured materials- Design and construction
ISBN :
978-1-4200-5511-5 , 978-0-8493-3180-0
