• Record number
    7464
  • Author

    Madou Marc J.

  • Creator Role
    نويسنده
  • Title

    Fundamentals of microfabrication and nanotechnology

  • Publication
    Boca Raton CRC Press
  • Published Year
    2012
  • Edition
    3
  • Fierst Pages
    xiii
  • Main Pages
    641
  • Collation
    xiii، 641، color، illus، tables
  • Reprint
    False
  • Contents
    V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology- V. 2. Manufacturing techniques for microfabrication and nanotechnology- V. 3. From MEMS to bio-MEMS and bio-NEMS: manufacturing techniques and applications
  • Subject

    Microelectronics , Integrated circuits- Design and construction , Microelectromechanical systems- Design and construction , Machining , Lasers- Industrial applications , Microelectronic packaging , Microfabrication , Nanostructured materials- Design and construction

  • Class
    621
  • Number
    38152
  • CutterNumber
    M 3
  • ISBN
    978-1-4200-5511-5 , 978-0-8493-3180-0
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=7&DC=7464