Record number :
7869
Title :
Handbook of VLSI microlithography: principle, technology and Applications
Publication :
New Jersey Noyes Publications
Published Year :
1991
Fierst Pages :
0
Main Pages :
650
Collation :
650
Notes :
621.381531^cH32 , Glossary
Reprint :
False
Contents :
0
Print issue :
0
Subject :
Integrated circuits- Very large scale integration+Microlithography
Class :
621.381531
CutterNumber :
H32
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=7&DC=7869