Record number

7869

Title

Handbook of VLSI microlithography: principle, technology and Applications

Publication

New Jersey Noyes Publications

Published Year

1991

Fierst Pages

0

Main Pages

650

Collation

650

Notes

621.381531^cH32 , Glossary

Reprint

False

Contents

0

Print issue

0

Subject

Integrated circuits- Very large scale integration+Microlithography

Class

621.381531

CutterNumber

H32

Language

انگليسي