عنوان مقاله :
بررﺳﯽ ﺣﺴﺎﺳﯿﺖ ﻓﺸﺎر ﺳﻨﺞ دﯾﺎﻓﺮاﮔﻤﯽ ﻣﺒﺘﻨﯽ ﺑﺮ ﻓﻨﺎوري ﻣﯿﮑﺮواﻟﮑﺘﺮوﻣﮑﺎﻧﯿﮏ ﺑﺎ اﺳﺘﻔﺎده از ﺗﺤﻠﯿﻞ اﻟﻤﺎن ﻣﺤﺪود
عنوان به زبان ديگر :
Evaluation of diaphragm pressure sensor sensitivity based on MEMS technology using finite element analysis
پديد آورندگان :
موسويان، فرحان فاقد وابستگي , برزوئي، داريوش فاقد وابستگي , فرج الهي، ميثم دانشگاه علم و صنعت ايران - دانشكده فناوري هاي نوين - گروه سيستم هاي انرژي
كليدواژه :
فشار سنج , فناوري مايكروالكترومكانيك , حساسيت تحليل المان محدود , ديافراگم موج دار
چكيده فارسي :
ﺳﻨﺴﻮرﻫﺎي ﻓﺸﺎر دﯾﺎﻓﺮاﮔﻤﯽ در ﺻﻨﺎﯾﻊ ﻣﺨﺘﻠﻔﯽ ﻣﻮرد اﺳﺘﻔﺎده ﻗﺮار ﻣﯽﮔﯿﺮﻧﺪ. ﭘﮋوﻫﺶ ﻫﺎي زﯾﺎدي ﺑﺮاي ﺑﻬﯿﻨﻪ ﺳﺎزي و ارﺗﻘﺎي ﮐﯿﻔﯽ اﯾﻦ ﺳﻨﺴﻮرﻫﺎ اﻧﺠﺎم ﮔﺮﻓﺘﻪ اﺳﺖ. در اﯾﻦ ﻣﻘﺎﻟﻪ، ﺣﺴﺎﺳﯿﺖ" ﺑﻪ ﻋﻨﻮان ﯾﮏ ﻣﺘﻐﯿﺮ ﮐﻠﯿﺪي در ﻃﺮاﺣﯽ ﺳﻨﺴﻮر ﻓﺸﺎر دﯾﺎﻓﺮاﮔﻤﯽ ﻣﺒﺘﻨﯽ ﺑﺮ ﻓﻨﺎوري ﻣﯿﮑﺮواﻟﮑﺘﺮوﻣﮑﺎﻧﯿﮏ ﻣﻮرد ﺑﺮرﺳﯽ ﻗﺮار ﮔﺮﻓﺘﻪ اﺳﺖ. ﻫﻨﺪﺳﻪ دﯾﺎﻓﺮاﮔﻢ ﯾﮑﯽ از ﺗﺎﺛﯿﺮ ﮔﺬارﺗﺮﯾﻦ ﻣﺘﻐﯿﺮﻫﺎ در ﺣﺴﺎﺳﯿﺖ ﯾﮏ ﻓﺸﺎر ﺳﻨﺞ دﯾﺎﻓﺮاﮔﻤﯽ اﺳﺖ ﮐﻪ ﻣﯽ ﺗﻮاﻧﺪ ﻋﻼوه ﺑﺮ ﺣﺴﺎﺳﯿﺖ، ﻣﺤﺪوده ﻋﻤﻠﮑﺮدي، دﻗﺖ ﺳﻨﺴﻮر، اﺑﻌﺎد و ﺣﺘﯽ ﻗﯿﻤﺖ آن را ﺗﺤﺖ ﺗﺎﺛﯿﺮ ﻗﺮار دﻫﺪ. ﻟﺬا ﺑﺎ ﻫﺪف اﻓﺰاﯾﺶ ﻋﻤﻠﮑﺮد و ﺣﺴﺎﺳﯿﺖ ﺳﻨﺴﻮر ﻫﺎي ﻓﺸﺎر، ﻧﺴﺒﺖ ﺑﻪ ﺷﺒﯿﻪ ﺳﺎزي دﯾﺎﻓﺮاﮔﻢ ﺳﻨﺴﻮر در ﻧﺮم اﻓﺰار ﺗﺠﺎري آﺑﺎﮐﻮس اﻗﺪام ﮔﺮدﯾﺪ و ﺿﻤﻦ اﻋﺘﺒﺎر ﺳﻨﺠﯽ ﺣﻠﮕﺮ ﻣﺤﺎﺳﺒﺎﺗﯽ، ﻫﻨﺪﺳﻪ ﻫﺎي ﻣﺨﺘﻠﻒ دﯾﺎﻓﺮاﮔﻢ ﻣﻮرد ارزﯾﺎﺑﯽ ﻗﺮار ﮔﺮﻓﺖ. ﻧﺘﺎﯾﺞ ﺑﺪﺳﺖ آﻣﺪه ﮔﻮاه آن ﺑﻮد ﮐﻪ دﯾﺎﻓﺮاﮔﻢ داﯾﺮه اي داراي ﺑﻬﺘﺮﯾﻦ ﻋﻠﻤﮑﺮد اﺳﺖ. در اﺛﺮ ﻣﻮج دار ﮐﺮدن ﺳﻄﺢ دﯾﺎﻓﺮاﮔﻢ ﺑﺮرﺳﯽ ﺷﺪ و ﺷﮑﻞ ﻫﺎي ﻣﺨﺘﻠﻔﯽ از ﻣﻮج ﻫﺎي اﯾﺠﺎدي در ﺑﺴﺘﺮ دﯾﺎﻓﺮاﮔﻢ، ﺷﺒﯿﻪ ﺳﺎزي ﮔﺮدﯾﺪ. ﻧﺘﺎﯾﺞ ﺑﺪﺳﺖ آﻣﺪه ﺣﺎﮐﯽ از آن ﺑﻮد ﮐﻪ اﯾﺠﺎد ﻣﻮج داﯾﺮه اي ﺑﺎ ﺷﻌﺎع 15 ﻣﯿﮑﺮوﻣﺘﺮ در اﻧﺘﻬﺎي ﺳﻄﺢ دﯾﺎﻓﺮاﮔﻢ، ﻣﻮﺟﺐ اﻓﺰاﯾﺶ 18 درﺻﺪي ﺣﺴﺎﺳﯿﺖ ﺳﻨﺴﻮر ﻣﯽ ﮔﺮدد.
چكيده لاتين :
Diaphragm pressure sensors are used in various industries. Much research has been
done to optimize and improve the quality of these sensors. This paper investigates "sensitivity"
as a critical variable in diaphragm pressure sensors based on MEMS technology. Aperture
geometry is one of the most influential variables in the sensitivity of a diaphragm
sphygmomanometer, which in addition to sensitivity, can affect other variables such as
operating range, sensor accuracy, dimensions, and even price. To increase the performance
and sensitivity of pressure sensors, the sensor aperture was simulated in AbaqusFEA software,
and while validating the computational solver, different geometries were evaluated. The
results showed that the circular diaphragm has the best performance. Then the effect of
corrugations on the surface of the diaphragm was investigated, and different forms of waves
were simulated. The results showed that creating a circular wave with a radius of 15 μm at the
end of the diaphragm surface increases the sensor's sensitivity by 18%.
عنوان نشريه :
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